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美国(Polysilicon)多晶硅生产工艺及多晶硅的用途
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美国(Polysilicon)多晶硅生产工艺及多晶硅的用途 1、改善蚀刻多晶硅的均匀性和减少其蚀刻速率变化的方法 2、多晶硅界定阶跃恢复器件 3、多晶硅栅极蚀刻后的无机抗反射涂层的干式各向同性移除 4、多晶硅表面金属杂质的清除 5、由多晶硅炉料制备熔硅熔料的方法 6、用多晶硅原料制备熔硅的方法 7、引入堆叠箱式电容单元的数兆位动态存储器的劈开-多晶硅CMOS工艺 8、一种多晶硅自对准双极器件及其制造工艺 9、在多晶硅上具有平滑界面的集成电路 10、三层多晶硅嵌入式非易失性存储器单元及其制造方法 11、用多晶硅炉料制备硅熔体的方法 12、用多晶硅掩模和化学机械抛光制造不同栅介质厚度的工艺 13、用场效应管和双极基极多晶硅层制造多晶硅电容器的方法 14、制作多晶硅-多晶硅/MOS叠层电容器的方法 15、高质量单晶制造中堆积和熔化多晶硅的方法 16、横向多晶硅PIN二极管及其制造方法 17、多晶硅化学气相沉积方法和装置 18、为快速擦写存储器装置的多晶硅提供掺杂质浓度的方法 19、为快速电可擦除可编程只读存储器单元形成相对于有源区自对准的浮动栅多晶硅层的方法 20、低温下用顺序横向固化制造单晶或多晶硅薄膜的系统和方法 21、用顺序横向固化制造均匀大晶粒和晶粒边界位置受控的多晶硅薄膜半导体的方法 22、挡板晶圆及其所用的随机定向多晶硅 23、闪存装置制造中用于多晶硅-1定义非临界互补掩膜方法 24、多晶硅的制备 25、在屏蔽的栅极场效应晶体管中形成多晶硅层间电介质的结构和方法 26、用于增加多晶硅熔化速率的间歇式加料技术 27、具有多晶硅源极接触结构的沟槽MOSFET器件 28、具有电压维持区域并从相反掺杂的多晶硅区域扩散的高电压功率MOSFET 29、用场效应管和双极基极多晶硅层制造多晶硅电容器的方法 30、超小粒径多晶硅的结构和方法 31、用于制造垂直DRAM中的钨/多晶硅字线结构的方法及由此制造的器件 32、由多晶硅装料制备熔化的硅熔体的方法和装置 33、采用多晶硅栅和金属栅器件的半导体芯片 34、在双金属/多晶硅氧化物氮化物氧化物硅阵列中的联结及选取步骤 35、用于动态阈值电压控制的多晶硅背栅SOI MOSFET 36、用于宽编程的双金属/多晶硅氧化物氮化物氧化物硅存储器单元 37、玻璃衬底的预多晶硅被覆 38、由P+或者N+掺杂多晶硅形成其传输门电路的图像传感器像素 39、光电二极管上设有多晶硅层的图像传感器及像素 40、具有高性能集成电路多晶硅凝集熔消组件的互补金属氧化物半导体的工艺 41、形成多晶硅的方法和在硅基材料中的MOSFET器件 42、形成多晶硅结构 43、具有多晶硅浮动隔离层的镜像存储单元晶体管对 44、具有单层多晶硅的镜像非易失性存储器单元晶体管对 45、精密多晶硅电阻器工艺 46、双胆碱和三胆碱在涂石英多晶硅和其它材料清洁中的用法 47、双掺杂多晶硅及锗化硅的蚀刻 48、利用双多晶硅的位线注入 49、低电压单层多晶硅电可擦编程只读存储器(EEPROM)存储单元 50、具有金属和多晶硅栅电极的高性能电路及其制造方法 51、具有发射极多晶硅源/漏区的EEPROM单元的制造 52、用于增加多晶硅熔化速率的间歇式加料技术 53、尤其在闪存中用于刻蚀多晶硅上钨硅化物的方法 54、用于产生结晶方向受控的多晶硅膜的系统和方法 55、用于使低温多晶硅薄膜面板平面化的多晶硅平面化溶液 56、具有多晶硅浮置隔片的镜像存储单元晶体管对的制造方法 57、控制多晶硅移除的方法 58、与CMOS兼容的单层多晶硅非易失性存储器 59、沟槽式多晶硅二极管 以下是美国(Polysilicon)多晶硅技术(全英文) 1、Polysilicon Deposition and Anneal Process Enabling Thick Polysilicon Films for MEMS Applications 2、SOI MOSFET DEVICE WITH REDUCED POLYSILICON LOADING ON ACTIVE AREA 3、POLYSILICON FILM HAVING SMOOTH SURFACE AND METHOD OF FORMING THE SAME 4、METHOD FOR FABRICATING POLYSILICON FILM, A GAS PHASE DEPOSITION APPARATUS AND AN ELECTRONIC DEVICE FORMED THEREBY 5、METHOD OF MANUFACTURING SOLAR-GRADE POLYSILICON INGOT WITH RELEVANT INDUCTION APPARATUS 6、Local Oxidation of Silicon Planarization for Polysilicon Layers Under Thin Film Structures 7、LOW PRESSURE CHEMICAL VAPOR DEPOSITION OF POLYSILICON ON A WAFER 8、Methods for forming MOS devices with metal-inserted polysilicon gate stack 9、ADDITION OF BALLAST HYDROCARBON GAS TO DOPED POLYSILICON ETCH MASKED BY RESIST 10、CMOS IMAGE DEVICE WITH POLYSILICON CONTACT STUDS 11、DIRECTIONAL SOLIDIFICATION METHOD FOR INCESSANTLY PRODUCING THE POLYSILICON INGOT AND THE RELATIVE INGOT CASTING PPARATUS 12、POLISHING COMPOSITION AND METHOD FOR HIGH SELECTIVITY POLYSILICON CMP 13、METHOD OF SIMULTANEOUSLY SILICIDING A POLYSILICON GATE AND SOURCE/DRAIN OF A SEMICONDUCTOR DEVICE, AND RELATED DEVICE 14、FORMING SILICIDED GATE AND CONTACTS FROM POLYSILICON GERMANIUM AND STRUCTURE FORMED 15、Method for reducing polysilicon gate defects in semiconductor devices 16、METHODS AND APPARATUS FOR FORMING A POLYSILICON CAPACITOR 17、INTEGRATION SCHEMES FOR FABRICATING POLYSILICON GATE MOSFET AND HIGH-K DIELECTRIC METAL GATE MOSFET 18、Deep Implant Self-Aligned To Polysilicon Gate 19、METHODS AND APPARATUSES FOR REMOVING POLYSILICON FROM SEMICONDUCTOR WORKPIECES 20、POLYSILICON CONDUCTIVITY IMPROVEMENT IN A SALICIDE PROCESS TECHNOLOGY 21、Silicide-Interface Polysilicon Resistor 22、LOW TEMPERATURE POLYSILICON THIN FILM TRANSISTOR DISPLAY AND METHOD OF FABRICATING THE SAME 23、Method of fabricating gate electrode having polysilicon film and wiring metal film 24、Polysilicon gate formation by in-situ doping 25、Polysilicon gate formation by in-situ doping 26、Method for fabricating polysilicon layer with large and uniform grains 27、UNDOPED POLYSILICON METAL SILICIDE WIRING 28、METHOD FOR FABRICATING BOTTOM-GATE LOW-TEMPERATURE POLYSILICON THIN FILM TRANSISTOR 29、MASK FOR FORMING POLYSILICON AND A METHOD FOR FABRICATING THIN FILM TRANSISTOR USING THE SAME 30、Method of forming polysilicon, thin film transistor using the polysilicon, and method of fabricating the thin film transistor 31、Forming Polysilicon Regions 32、Polysilicon Dummy Wafers and Process Used Therewith 33、ZERO INTERFACE POLYSILICON TO POLYSILICON GATE FOR SEMICONDUCTOR DEVICE 34、Split gate formation with high density plasma (HDP) oxide layer as inter-polysilicon insulation layer 35、ZERO INTERFACE POLYSILICON TO POLYSILICON GATE FOR FLASH MEMORY 36、NON-VOLATILE MEMORY DEVICE WITH POLYSILICON SPACER AND METHOD OF FORMING THE SAME 37、DETECTION OF CLEARANCE OF POLYSILICON RESIDUE 38、Trench polysilicon diode 39、METHOD FOR AVOIDING POLYSILICON DEFECT 40、METHOD FOR FABRICATING LANDING POLYSILICON CONTACT STRUCTURES FOR SEMICONDUCTOR DEVICES 41、Semiconductor Device Having a Random Grained Polysilicon Layer and a Method for its Manufacture 42、DOUBLE-DOPED POLYSILICON FLOATING GATE 43、Electron mobility enhancement for MOS devices with nitrided polysilicon re-oxidation 44、POLYSILICON CONTAINING RESISTOR WITH ENHANCED SHEET RESISTANCE PRECISION AND METHOD FOR FABRICATION THEREOF 45、Method For Selective CMP Of Polysilicon 46、POLYSILICON THIN FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD THEREOF 47、METHOD OF EVALUATING THE UNIFORMITY OF THE THICKNESS OF THE POLYSILICON GATE LAYER 48、Method and apparatus for strapping two polysilicon lines in a semiconductor integrated circuit device 49、SILICIDED POLYSILICON SPACER FOR ENHANCED CONTACT AREA 50、Method for fabricating a polysilicon layer having large and uniform grains 51、Non-volatile memory cells having a polysilicon-containing, multi-layer insulating structure, memory arrays including the same and methods of operating the same 52、PLANARIZATION METHOD USING HYBRID OXIDE AND POLYSILICON CMP 53、FABRICATION OF CCD IMAGE SENSORS USING SINGLE LAYER POLYSILICON 54、Polysilicon levels for silicided structures including MOSFET gate electrodes and 3D devices 55、Methods of etching polysilicon and methods of forming pluralities of capacitors 56、TAPERED VOLTAGE POLYSILICON DIODE ELECTROSTATIC DISCHARGE CIRCUIT FOR POWER MOSFETS AND ICs 57、Polysilicon thin film transistor and method of fabricating the same 58、DUAL POLYSILICON GATE OF SEMICONDUCTOR DEVICE WITH MULTI-PLANE CHANNEL AND FABRICATION METHOD THEREOF 59、LOW TEMPERATURE POLYSILICON THIN FILM TRANSISTOR 60、Lateral trench MOSFET with direct trench polysilicon contact and method of forming the same 61、E-Fuse and Method for Fabricating E-Fuses Integrating Polysilicon Resistor Masks 62、METHOD OF FORMING POLYSILICON PATTERN 63、Method For Cleaning A Polysilicon Fraction 64、Method of removing a photoresist pattern, method of forming a dual polysilicon layer using the removing method and method of manufacturing a semiconductor device using the removing 65、Method for fabricating polysilicon film 66、METHOD FOR FABRICATING DOPED POLYSILICON LINES 67、METHOD OF CONTROLLING GRAIN SIZE IN A POLYSILICON LAYER AND IN SEMICONDUCTOR DEVICES HAVING POLYSILICON STRUCTURE 68、SYSTEM AND METHOD FOR I/O ESD PROTECTION WITH POLYSILICON REGIONS FABRICATED BY PROCESSES FOR MAKING CORE TRANSISTORS 69、Metal-insulator-metal-structured capacitor formed with polysilicon 70、MANUFACTURING EQUIPMENT FOR POLYSILICON INGOT 71、Process including silo-chloro passivation for etching tungsten silicide overlying polysilicon 72、Process for etching tungsten silicide overlying polysilicon particularly in a flash memory 73、Formation of high sheet resistance resistors and high capacitance capacitors by a single polysilicon process 74、Method of enhancing gate lithography performance by polysilicon chemical-mechanical polishing 75、POLYSILICON HARD MASK FOR ENHANCED ALIGNMENT SIGNAL 76、E-FUSE AND METHOD FOR FABRICATING E-FUSES INTEGRATING POLYSILICON RESISTOR MASKS 77、Method of forming a polysilicon film and method of manufacturing a thin film transistor including a polysilicon film 78、Polysilicon control etch-back indicator 79、Polysilicon thin film transistor device and method of fabricating the same 80、Increased polysilicon deposition in a CVD reactor 81、POLYSILICON FILM HAVING SMOOTH SURFACE AND METHOD OF FORMING THE SAME 82、METHOD AND STRUCTURE FOR SELF ALIGNED FORMATION OF A GATE POLYSILICON LAYER 83、Method and Device For Comminuting and Sorting Polysilicon 84、Formation of a smooth polysilicon layer 85、Method for fabricating polysilicon liquid crystal display device 86、SOLID-STATE IMAGE SENSING DEVICE INCLUDING ANTI-REFLECTION STRUCTURE INCLUDING POLYSILICON AND METHOD OF MANUFACTURING THE SAME 87、METHOD FOR CRYSTALLIZING AMORPHOUS SILICON INTO POLYSILICON AND MASK USED THEREFOR 88、MASK FOR CRYSTALLIZING POLYSILICON AND A METHOD FOR FORMING THIN FILM TRANSISTOR USING THE MASK 89、POLYSILICON STRUCTURE, THIN FILM TRANSISTOR PANEL USING THE SAME, AND MANUFACTURING METHOD OF THE SAME 90、POLYSILICON STRUCTURE, THIN FILM TRANSISTOR PANEL USING THE SAME, AND MANUFACTURING METHOD OF THE SAME 91、System and method for I/O ESD protection with floating and/or biased polysilicon regions 92、Method and structure for a self-aligned silicided word line and polysilicon plug during the formation of a semiconductor device 93、METHOD OF FABRICATING A POLYSILICON LAYER AND A THIN FILM TRANSISTOR 94、Slurry compositions, methods of polishing polysilicon layers using the slurry compositions and methods of manufacturing semiconductor devices using the slurry compositions 95、Non-volatile floating gate memory cells with polysilicon storage dots and fabrication methods thereof 96、Trench polysilicon diode 97、LOW-VOLTAGE SINGLE-LAYER POLYSILICON EEPROM MEMORY CELL 98、CVD apparatus for depositing polysilicon 99、Polysilicon Conductor Width Measurement for 3-Dimensional FETs 100、Organic light emitting diode (OLED) display panel and method of forming polysilicon channel layer thereof 101、METHOD OF MANUFACTURING A LOW TEMPERATURE POLYSILICON FILM 102、METHOD TO FORM LARGE GRAIN SIZE POLYSILICON FILMS BY NUCLEI-INDUCED SOLID PHASE CRYSTALLIZATION 103、Low-temperature polysilicon display and method for fabricating same 104、STRUCTURE FOR MONITORING SEMICONDUCTOR POLYSILICON GATE PROFILE 105、LOW-VOLTAGE SINGLE-LAYER POLYSILICON EEPROM MEMORY CELL 106、METHODS FOR FABRICATING POLYSILICON FILM AND THIN FILM TRANSISTORS 107、LOW COST AND LOW DISHING SLURRY FOR POLYSILICON CMP 108、Method for controlling polysilicon removal 109、Integrated thermal characterization and trim of polysilicon resistive elements 110、Low temperature polysilicon thin film transistor display and method of fabricating the same 111、POLYSILICON THIN FILM FABRICATION METHOD 112、POLYSILICON ETCHING METHODS 113、METHOD OF FORMING POLYSILICON FILM USING A LASER ANNEALING APPARATUS 114、INTEGRATED CIRCUIT CONTAINING POLYSILICON GATE TRANSISTORS AND FULLY SILICIDIZED METAL GATE TRANSISTORS 115、Methods of Forming Conductive Polysilicon Thin Films Via Atomic Layer Deposition and Methods of Manufacturing Semiconductor Devices Including Such Polysilicon Thin Films 116、INTEGRATED CIRCUIT CONTAINING POLYSILICON GATE TRANSISTORS AND FULLY SILICIDIZED METAL GATE TRANSISTORS 117、Polysilicon thin film transistor and method of fabricating the same 118、Composition and methods removing polysilicon 119、MOS semiconductor devices having polysilicon gate electrodes and high dielectric constant gate dielectric layers and methods of manufacturing such devices 120、Method and structure for landing polysilicon contact 121、METHOD OF FORMING THIN FILM TRANSISTOR AND METHOD OF REPAIRING DEFECTS IN POLYSILICON LAYER 122、MANUFACTURING METHOD OF POLYSILICON 123、DUAL WORK FUNCTION GATE ELECTRODES USING DOPED POLYSILICON AND A METAL SILICON GERMANIUM COMPOUND 124、METHOD OF DEFINING POLYSILICON PATTERNS 125、SELECTIVE POLYSILICON STUD GROWTH 126、Methods of enabling polysilicon gate electrodes for high-k gate dielectrics 127、METHOD OF FABRICATING POLYSILICON FILM 128、Method of forming polysilicon layers in a transistor 129、MOS device and a process for manufacturing MOS devices using a dual-polysilicon layer technology with side contact 130、DOUBLE GATE TRANSISTORS HAVING AT LEAST TWO POLYSILICON PATTERNS ON A THIN BODY USED AS ACTIVE REGION AND METHODS OF FORMING THE SAME 131、SEMICONDUCTOR DEVICE WITH ROBUST POLYSILICON FUSE 132、Methods of forming polysilicon-comprising plugs and methods of forming FLASH memory circuitry 133、Maskless multiple sheet polysilicon resistor 134、Method of manufacturing polysilicon thin film and method of manufacturing thin film transistor having the same 135、Single wafer thermal CVD processes for hemispherical grained silicon and nano-crystalline grain-sized polysilicon 136、Method for forming low temperature polysilicon thin film transistor with low doped drain structure 137、Method of manufacturing polysilicon thin film transistor plate and liquid crystal display including polysilicon thin film transistor plate manufactured by the method 138、Lateral Programmable Polysilicon Structure Incorporating Polysilicon Blocking Diode 139、Method to selectively form SiGe P type electrode and polysilicon N type electrode through planarization 140、Non-dispersive high density polysilicon capacitor utilizing amorphous silicon electrodes 141、Integrated circuit containing polysilicon gate transistors and fully silicidized metal gate transistors 142、FABRICATION METHOD OF A LOW-TEMPERATURE POLYSILICON THIN FILM TRANSISTOR 143、Electrically conductive line, method of forming an electrically conductive line, and method of reducing titanium silicide agglomeration in fabrication of titanium silicide over polysilicon transistor gate lines 144、Application of single exposure alternating aperture phase shift mask to form sub 0.18 micron polysilicon gates 145、Method of forming dual polysilicon gate of semiconductor device 146、Method for the production of a micromechanical part preferably used for fluidic applications, and micropump comprising a pump membrane made of a polysilicon layer 147、Method of etching dual pre-doped polysilicon gate stacks using carbon-containing gases additions 148、SOI MOSFET device with reduced polysilicon loading on active area 149、Method of making transistors and non-silicided polysilicon resistors for mixed signal circuits 150、LOW TOLERANCE POLYSILICON RESISTOR FOR LOW TEMPERATURE SILICIDE PROCESSING 151、ADDITION OF BALLAST HYDROCARBON GAS TO DOPED POLYSILICON ETCH MASKED BY RESIST 152、Semiconductor structure having multilayer of polysilicon and display panel applied with the same 153、Cobalt/nickel bi-layer silicide process for very narrow line polysilicon gate technology 154、ETCHING PROCESS TO AVOID POLYSILICON NOTCHING 155、Methods for forming a P-type polysilicon layer in a semiconductor device 156、Method of improved high K dielectric - polysilicon interface for CMOS devices 157、Polysilicon film, thin film transistor using the same, and method for forming the same 158、Method of improved high K dielectric - polysilicon interface for CMOS devices 159、Method for increasing polysilicon grain size 160、Image sensor pixel having a transfer gate formed from P+ or N+ doped polysilicon 161、Method of polycrystallization, method of manufacturing polysilicon thin film transistor, and laser irradiation device therefor 162、METHOD OF FORMING A POLYSILICON RESISTOR 163、Image sensor and pixel having a polysilicon layer over the photodiode 164、Method of manufacturing a polysilicon layer and a mask used therein 165、METHOD FOR FABRICATING DOPED POLYSILICON LINES 166、Polysilicon memory element 167、Selective deposition of ZnO nanostructures on a silicon substrate using a nickel catalyst and either patterned polysilicon or silicon surface modification 168、Doped polysilicon via connecting polysilicon layers 169、Polysilicon conductor width measurement for 3-dimensional FETs 170、Polysilicon sidewall spacer lateral bipolar transistor on SOI 171、LOW TEMPERATURE POLYSILICON THIN FILM TRANSISTOR AND METHOD OF FABRICATING LIGHTLY DOPED DRAIN THEREOF 172、METHOD OF FORMING A POLYSILICON RESISTOR 173、Large-grain p-doped polysilicon films for use in thin film transistors 174、Double layer polysilicon gate electrode 175、Lateral programmable polysilicon structure incorporating polysilicon blocking diode 176、Method for planarizing polysilicon 177、Method and apparatus for polysilicon resistor formation 178、Diffusion barrier process for routing polysilicon contacts to a metallization layer 179、Method to produce highly doped polysilicon thin films 180、Methods of enabling polysilicon gate electrodes for high-k gate dieletrics 181、Methods of forming semiconductor devices including removing a thickness of a polysilicon gate layer 182、Structure for monitoring semiconductor polysilicon gate profile 183、Mask for making polysilicon structure, method of making the same, and method of making thin film transistor using the same 184、Method of depositing polysilicon 185、Method for forming polysilicon local interconnects 186、Method for manufacturing polysilicon layer and a TFT using the same 187、A Recessed Polysilicon Gate Structure for a Strained Silicon MOSFET Device 188、Method for forming an array with polysilicon local interconnects 189、Method for forming a floating gate memory with polysilicon local interconnects
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